Laboratory of microprocessing and rapid prototyping

The main research facilities:

•  achievement of the micro-electromechanical components using LIGA technology with UV laser lithography      (DWL 66 FS equipment) and photoresist removal          (STP 2020 equipment);
•  excimer laser ablation (COMPex Pro 205 F equipment);
•  precision micro processing on turning and milling CNC machines (OKUMA, KERN, TOPPER, DIAMOND equipment);
•  cylindrical (winding machine TAK-01) and toroidal coils (winding machine SMC-1);
•  Wire Electric Discharge Machine  (KNUTH equipment) and Sinker Electric Discharge Machine (ZNC 210 equipment);
•  rapid prototyping through 3D printing (3D 400x350x400 printer, by STRATASYS FORTUS 360), materials: ABS; polycarbonate; Nylon.

Practical achievements obtained by LIGA technology

Equipment

Mechanical micromachining equipment

• High-precision CNC machining center on 5 axes – KERN Micro,
• CNC Machining center on 3 axes – TOPPER TMV 400,
• Swiss Type CNC auto Lathe – DIAMOND 12,
• CNC Electric Discharge Machine with wire, type Smart Dem by KHUTH,
• Sinker Electric Discharge Machine, type – ZNC-EDM 250, by KNUTH,
• CNC Machining center for turning and milling in 5 axes type Multus B200 II C750, by OKUMA.

MEMS processing facilities – LIGA technology equipment

• DWL 66FS Maskless Laser Lithography System, by Heidelberg Instruments, Germany,
• STP 2020 Stripping Tool for SU-8, made by R3T,
• Toroidal winding machine – by JOVIL,

Cylindrical winding machine – made by NITTOKU